Boosting properties of parts for semiconductors manufacturing
thanks to Silicon Carbide nanopowders
Reinforced seals with nano SiC and semiconductor parts in SiC.
In use inside perfluoroelastomers FFKM & FKM, SiC nanopowders improve the performance of these materials in order to increase their life time, especially during the plasma etching steps.
The SiC nanopowders can be sintered or used as raw materials to make parts as susceptors or SiC parts.
Reduce the cost of ownership
Optimiser la durée d’utilisation
Improve the yield
High performances seals
In use inside perfluoroelastomers FFKM & FKM, SiC nanopwders improve the performance of these materials in order to increase their life time, especially during the plasma etching steps.
a solution to semiconductors specifications
The Silicon Carbide is an excellent material to make elements for semiconductors manufacturing. The very high purity of SiC nanopowders from Nanomakers meets the specifications of semiconductors sector.
Semiconductors market needs
and the proposal with NMSiC
The elastomers in use in the semiconductor manufacturing process must meet various constraints:
The requested properties for wafer carriers in semiconductor sector are:
A high purity
A perfect homogeneity of mechanical and thermal properties
A densification close to 100%
A good mechanical resistance
A great stability at high temperature
A precis control of the geometry
Contribution of NMSiC
The reinforcement of seals by NMSiC allows:
An increase of resistance in temperature
An improvement of chemical resistance
A lower particle contamination compared to standard additives like carbon black
The sintering of nano SiC (NMSiC99) can obtain:
A densification ~100% without sintering additives
A purity of 5N
A very fine microstructure
A good mechanical and thermal resistance
An improvement of the operation process
An increase of equipment availability
An extension of use time before the replacement of reinforced parts
Pages in the website:
Sintering of SiC and Si nanopowders
Resources to be downloaded:
Technical data about reinforcing FFKM seals by nano SiC
Technical data about sintered SiC